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도서명
An Introduction to Microelectromechanical Systems Engineering
저자/역자
Nadim Maluf
출판사
Artech House
분야
RF/Microwave 개론
목차/설명
For those new to MEMS, this text serves as an excellent primer for engineers, scientists, students, and researchers who want to learn about the basic of MEMS and to get a quick, broad overview of the field. Since this is an introductory book, the author does a nice job of describing a wide range of applications from diverse fields. Because the author is the head of research and development at a leading MEMS fabrication company, he has the unique perspective of knowing where future MEMS developments are leading. Beginners to MEMS technology will find this book an excellent source of information to get a broad overview of the field.”
---IEEE Electrical Insulation Magazine, September/October 2000
Here뭩 the first non-technical introduction to the exciting field of Microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS -- including silicon, polymers and glass and quartz substrates -- as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using techniques such as oxidation, lithography, chemical vapor deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defense.
A unique element of this book is its look at the future of MEMS -- its potential for microelectrode arrays, actuators and optical switches and other technologies. It is a unique,. first-of-its-kind recourse that will appeal to managers, consultants and engineers looking to understand and exploit the commercial potential for MEMS as well as university professors and graduate students.
Contents: MEMS: A Technology from Lilliput. The Sandbox: Materials for MEMS. The Toolbox: Processes for Micromachining. The Gearbox: Commercial MEM Structures and Systems. The New Gearbox: A Peek Into The Future. The Box: Packaging For MEMS.
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